Semiconductor production system, cluster tool, control method of semiconductor production system and maintenance method of cluster tool

ABSTRACT

PS control sections MC 1 , MC 2  configured to independently control the operations in process ships PS 1 , PS 2  are provided respectively, and an LM control section MC 3  configured to control the operation in a loader module LM is provided independently.  
     With this structure, the operations of the process ships PS 1 , PS 2  and the loader module LM can be checked while the process ships PS 1 , PS 2  are not coupled to the loader module LM.

TECHNICAL FIELD

[0001] The present invention relates to a semiconductor productionsystem, a cluster tool, a control method of the semiconductor productionsystem, and a maintenance method of the cluster tool.

BACKGROUND ART

[0002] In some conventional semiconductor production systems,semiconductor devices are produced while a plurality of process shipsintended for processing wafers or keeping the wafers on standby thereinare coupled to a loader module intended for housing, transferring, andso on of the wafers, and in semiconductor production systems of such atype, additional installation of process ships is possible.

[0003] Here, when a process ship is to be additionally installed, theprocess ship to be additionally installed is coupled to the loadermodule and the whole system is operated in order to check the operationof the process ship. Further, when the maintenance of the process shipis to be performed, the electric power to the whole system isinterrupted to stop the whole system.

[0004] However, in the method in which the whole system is operated inorder to check the operation of the process ship, it is necessary toprepare all modules and parts and normally connect them, which has posedthe problem of a long startup time of the system.

[0005] Moreover, in the method in which the whole system is stopped whenthe maintenance of the process ship is performed, there has been aproblem that production efficiency is lowered since other process shipsare caused to be in a non-operable state.

DISCLOSURE OF THE INVENTION

[0006] It is an object of the present invention to provide asemiconductor production system and a control method thereof in which apart of the system can be independently controlled.

[0007] It is another object of the present invention to provide acluster tool and a maintenance method thereof in which the maintenanceof a part of the equipment can be performed without stopping the wholeequipment.

[0008] In order to solve the problems stated above, according to anaspect of the present invention, it is characterized in that itincludes: a process ship having a process chamber and a load lockchamber coupled to each other; and an independent control sectionconfigured to control the process ship to operate while the process shipis not coupled to a loader module.

[0009] This structure makes it possible to control the process ship toindependently operate, and consequently, it becomes unnecessary tooperate a whole cluster tool in order to check the operation of theprocess ship, which enables efficient startup of the process ship.

[0010] According to another aspect of the present invention, it ischaracterized in that it includes: a loader module configured to house,align, and transfer an object to be processed; and an independentcontrol section configured to control the loader module to operate whilethe loader module is not coupled to a process ship.

[0011] This structure makes it possible to control the loader module toindependently operate, and consequently, it becomes unnecessary tooperate a whole cluster tool in order to check the operation of theloader module, which enables efficient startup of the loader module.

[0012] According to still another aspect of the present invention, it ischaracterized in that it includes: a plurality of process chambers eachconfigured to process an object to be processed; load lock chamberscoupled to the process chambers respectively and each configured totransfer the object to be processed to each of the process chambers; aloader module coupled to the load lock chambers and configured totransfer the object to be processed to each of the load lock chambers;and an independent control section configured to independently controleach unit that is an object of maintenance.

[0013] This structure makes it possible to stop the unit that is theobject of the maintenance while units other than the object of themaintenance are kept operated, and accordingly, the maintenance can beperformed while production is continued using the units other than theobject of the maintenance, which enables improvement in productionefficiency.

[0014] According to yet another aspect of the present invention, it ischaracterized in that transfer of each unit is independently controlledwhile a unit to be additionally installed of a cluster tool is notcoupled.

[0015] This structure makes it possible to separately check theoperation of a process ship and a loader module, and consequently, itbecomes unnecessary to operate the whole system in order to additionallyinstall the process ship, which enables efficient startup of the system.

[0016] According to yet another aspect of the present invention, it ischaracterized in that, in a maintenance method of a cluster tool inwhich a plurality of process ships are coupled to a loader module,maintenance is carried out while only a unit that is an object of themaintenance is stopped.

[0017] This structure makes it possible to continue production using apart of units in a cluster tool while the maintenance of the other unitsis carried out, which enables improvement in production efficiency.

BRIEF DESCRIPTION OF DRAWINGS

[0018]FIG. 1 is a block diagram showing the schematic configuration of apower supply system of a cluster tool according to an embodiment of thepresent invention.

[0019]FIG. 2 is a block diagram showing a shift method of an operationmode of the cluster tool according to the embodiment of the presentinvention.

[0020]FIG. 3 is a block diagram showing the schematic configuration ofthe cluster tool and a control system according to the embodiment of thepresent invention.

[0021]FIG. 4 is a block diagram showing the configuration of independentcontrol of a process ship according to the embodiment of the presentinvention.

[0022]FIG. 5 is a block diagram showing the configuration of

[0023]FIG. 4 is a block diagram showing the configuration of independentcontrol of a process ship according to the embodiment of the presentinvention.

[0024]FIG. 5 is a block diagram showing the configuration of independentcontrol of a loader module according to the embodiment of the presentinvention.

[0025]FIG. 6 is a flowchart showing an independent maintenance methodaccording to a first embodiment of the present invention.

[0026]FIG. 7 is a flowchart showing an independent maintenance methodaccording to a second embodiment of the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION

[0027] Hereinafter, a cluster tool according to an embodiment of thepresent invention will be explained with reference to the drawings.

[0028]FIG. 1 is a block diagram showing the schematic configuration of acluster tool and a control system according to an embodiment of thepresent invention. In FIG. 1, a loader module LM includes load ports LP1to LP3, a transfer chamber TR, and an orienter OR, and process ships PS1and PS2 are coupled to this loader module LM via load lock doors LD1 andLD2. To the transfer chamber TR, the orienter OR is coupled and the loadports LP1 to LP3 are coupled via load port doors CD1 to CD3, and in theload ports LP1 to LP3, cassettes CS1 to CS3 housing unprocessed wafers Wand processed wafers W are disposed.

[0029] The transfer chamber TR has therein loader arms LA1 and LA2having a two-stage structure, and the loader arms LA1 and LA2 transferthe wafers W between the load ports LP1 to LP3 and the load lockchambers LL1 and LL2. Here, since the loader arms LA1 and LA2 have thetwo-stage structure, it is possible to carry a wafer W in by one of theloader arms LA1 and LA2 while a wafer W is carried out by the other oneof the loader arms LA1 and LA2, which enables efficient replacement ofthe wafers W.

[0030] In the process ships PS1 and PS2, the load lock chambers LL1 andLL2 and process chambers PM1 and PM2 are provided, and the load lockchambers LL1 and LL2 and the process chambers PM1 and PM2 are coupled toeach other via process gates PG1 and PG2. In the load lock chambers LL1and LL2, wafer mounting tables B11, B12, and B21, B22, and load lockarms LR1 and LR2 are provided respectively, and on the wafer mountingtables B12 and B22, the wafers W carried in from the loader module LMare mounted and the wafers W to be carried out of the load lock chambersLL1 and LL2 are mounted. On the wafer mounting tables B11 and B21, thewafers W to be carried into the process chambers PM1 and PM2 aremounted. The load lock arms LR1 and LR2 transfer the wafers W betweenthe load lock chambers LL1 and LL2 and the process chambers PM1 and PM2.Here, the air of the load lock chambers LL1 and LL2 are released to theatmosphere while the process chambers PM1 and PM2 are kept at apredetermined vacuum degree in order to prevent contamination.Therefore, in the load lock chambers LL1 and LL2, air supply and exhaustare carried out at the time of transfer to/from the transfer chamber TRor the transfer to/from the process chambers PM1 and PM2, so as to keepthe vacuum degrees of both.

[0031] PS control sections (process ship machine controllers) MC1 andMC2 each intended for independently controlling the hardware of each ofthe process ships PS1 and PS2 are provided in the process ships PS1 andPS2 respectively, and a LM control section (loader module machinecontroller) MC3 intended for independently controlling the hardware ofthe loader module LM is provided in the loader module LM. These PScontrol sections MC1 and MC2 and the LM control section MC3 areconnected to the process ships PS1 and PS2 and the loader module LM viaI/O boards 101 to 103 configured to input/output data and addresses.

[0032] The PS control sections MC1 and MC2 and the LM control sectionMC3 are also connected to a central control section (equipmentcontroller) EC via a hub HB1, and the central control section EC isconnected to a display section D1. Here, the central control section ECcontrols the process ships PS1 and PS2 and the loader module LM so thatthe process ships PS1 and PS2 and the loader module LM operate incoordination with one another. A command is given to the central controlsection EC from the display section D1, so that the whole equipment canbe controlled to operate in coordination.

[0033] A system interlock board SL to control interlock of the wholeequipment is provided in the loader module LM, and it stops theoperation of the whole equipment upon receiving an interlock signal.

[0034] Incidentally, each of the PS control sections MC1 and MC2 and theLM control section MC3 can be constituted by a controller composed of,for example, a CPU, a SRAM in which adjustment values and parameters arestored, a memory in which programs for operating the CPU are stored, andthe like. When programs to control the process ships PS1 and PS2 and theloader module LM are installed in the memories provided in the PScontrol sections MC1 and MC2 and the LM control section MC3respectively, the hardware of each of the process ships PS1 and PS2 andthe loader module LM can be controlled to operate independently.

[0035] The central control section EC can be constituted by, forexample, an equipment controller or a personal computer, and theinstallation of a program to control the whole equipment in the personalcomputer enables the control of the whole equipment.

[0036]FIG. 2 is a block diagram showing the schematic configuration of apower supply system of the cluster tool according to the embodiment ofthe present invention. In FIG. 2, provided is a common power supply CBto supply the process ships PS1 and PS2 and the loader module LM withelectric powers from a power line L4. Here, breakers B1 to B3 forelectric power interruption are separately provided in power lines L1 toL3 through which the electric powers are supplied to the process shipsPS1 and PS2 and the loader module LM, so that each of the process shipsPS1 and PS2 and the loader module LM can be independently supplied withthe electric power. The process ships PS1 and PS2 and the loader moduleLM also have hardwire interlock mechanisms, which can interlock hardwireby opening terminals T1 to T3 when the process ships PS1 and PS2 and theloader module LM are not coupled to one another. To be more specific,the breaker B4 is provided in the power line L4, and when a magnetconductor MC receives a hardwire interlock signal, the breaker B4 isturned off to interrupt the electric power supply to the process shipsPS1 and PS2 and the loader module LM. Therefore, when the process shipsPS1 and PS2 are removed or coupled while the equipment is in operation,the electric power to the whole equipment can be interrupted. FIG. 3 isa block diagram showing a shift method of an operation mode of thecluster tool according to the embodiment of the present invention. InFIG. 3, provided are a normal mode M1 in which the whole equipment isoperated while the process ships PS1 and PS2 and the loader module LMare coupled to one another and an independent mode M4 in which each ofthe process ships PS1 and PS2 and the loader module LM is independentlyoperated while the process ships PS1 and PS2 and the loader module LMare not coupled to one another, and the normal mode M1 and theindependent mode M4 include normal transfer modes M2 and M5 andmaintenance modes M3 and M6 respectively.

[0037] Therefore, normal transfer and maintenance can be performed bythe same operation both in the normal mode M1 and the independent modeM4, which enables operation without being conscious of independentcontrol even when the process ships PS1 and PS2 and the loader module LMare independently controlled.

[0038] The maintenance modes M3 and M6 have an independent maintenancemode M7 in which independent maintenance of only a part of the equipmentis possible without stopping the whole equipment, and this independentmaintenance mode M7 has a group power-off mode GP and a module power-offmode MP. Here, in the group power-off mode GP, it is possible to producethe state in which all the power supplies involved in a designated group(the process ship PS1 or PS2, or the loader module LM) can be turnedoff. This makes it possible to stop only one of the process ships PS1and PS2 while the whole equipment is in operation and to perform themaintenance of this process ship PS1 or PS2 while the other one of theprocess ships PS1 and PS2 and the loader module LM are kept operated.

[0039] In the module power-off mode MP, it is possible to produce thestate in which only power supply involved in a designated module can beturned off. Consequently, it is possible to exchange parts of the I/Oboard 101 to 103 while a communication line connected to, for example,one of the I/O boards 101 to 103 is physically/electricallydisconnected, and to establish reconnection by moving the communicationline after the installation.

[0040]FIG. 4 is a block diagram showing the configuration of independentcontrol of the process ship according to the embodiment of the presentinvention. In FIG. 4, in order to operate, for example, the process shipPS1 independently, the process ship PS1 is physically removed from thecluster tool in FIG. 1 while all the powers of the cluster tool in FIG.1 are turned off. Then, a personal computer PC1 or an equipmentcontroller that provides a GUI (graphical user interface) function andgives a command of a transfer procedure and so on is connected to the PScontrol section MC1 via a hub HB2. Further, a PS1 power supply to supplyelectric power to the process ship PS1 is connected and a jig I/L boardJL to emulate interlock that needs to be cancelled in order to put theprocess ship PS1 into independent operation is attached. Further, a jigcover CV1 for danger protection is attached, and “air” and “N2” aresupplied via a pseudo pressure switch SW for “air” and “N2”. Then, anurgent stop signal and a hardwire interlock signal outputted from theprocess ship PS1 are supplied to the jig I/L board JL, a door open/closeprohibiting signal outputted from the jig cover CV1 is supplied, and agas valve close signal and a solenoid valve power-off signal outputtedfrom the pressure switch SW are supplied.

[0041] Here, the PS control section MC1 has all the functions forcontrolling the process ship PS1 to operate in terms of hardware, suchas functions for operating the load lock arm LR1 and for opening/closingvalves. Therefore, when the personal computer PC1 gives the command ofthe transfer procedure to the PS control section MC1, it is madepossible to control the process ship PS1 to independently operate in thestate as if the process ship PS1 were coupled to the loader module LM,and consequently, an operator can operate the process ship PS1 withoutbeing conscious of independent control.

[0042] Therefore, by giving a command to the personal computer PC1 fromthe display section D2, the operator can check and adjust theindependent operation of the process ship PS1 (teaching of the load lockarm LR1 and so on), and can make process evaluation, which enablesreduction in the lead time (the time from the order to the delivery ofthe equipment).

[0043]FIG. 5 is a block diagram showing the configuration of independentcontrol of the loader module according to the embodiment of the presentinvention. In FIG. 5, in order to operate the loader module LMindependently, the loader module LM is physically removed from thecluster tool in FIG. 1 while all the powers of the cluster tool in FIG.1 are turned off. Then, a personal computer PC2 or an equipmentcontroller that provides a GUI (graphical user interface) function andgives a command of the transfer procedure and so on is connected to theLM control section MC3 via a hub HB3. Further, an LM power supply LB tosupply electric power to the loader module LM is connected via a breakerB5, jig covers CV2 and CV3 having a function of allowing the loader armsLA1 and LA2 to tentatively put wafers thereon are attached, and afacility check jig FC capable of checking all the interlock factors sentfrom the process ships PS1 and PS2 is attached. Then, an interlocksignal outputted from the facility check jig FC is supplied to thesystem interlock board SL while load lock chamber door non-open signalsoutputted from the jig covers CV2 and CV3 and a signal for cancelinginterlock that prohibits the extension of the loader arms LA1 and LA2 tothe load lock chambers LL1 and LL2 are supplied.

[0044] Here, the LM control section MC3 has all the functions forcontrolling the loader module LM to operate in terms of hardware, suchas functions for operating the loader arms LA1 and LA2 and foropening/closing valves. Therefore, when the personal computer PC2 givesthe command of the transfer procedure to the LM control section MC3, itis possible to control the loader module LM to independently operate inthe state as if the process ship PS1 were coupled to the loader moduleLM, and consequently, the operator can operate the loader module LMwithout being conscious of independent control.

[0045]FIG. 6 is a flowchart showing an independent maintenance methodaccording to a first embodiment of the present invention. Note that, inthis first embodiment, independent maintenance is performed in the grouppower-off mode GP in FIG. 3. In this group power-off mode GP, it ispossible to produce the state in which all the power supplies involvedin a designated group can be turned off. Further, all the powers forusage (water, air, and so on) supplied to this group can be alsointerrupted and an electric power to the CPU of this group can be alsointerrupted.

[0046] In FIG. 6, an operator shifts on a screen of the display sectionD1 in FIG. 1 to a maintenance window of the group for which themaintenance is to be performed (S1), and gives a group power-off mode GPexecution demand (S2). Here, an example of a possible group to bedesignated as the group for which the maintenance is to be performed isthe process ship PS1 or PS2, or the loader module LM.

[0047] When the group power-off mode GP execution demand is given, i)the I/O board 101 to 103 of the corresponding group is initialized, andii) an Ethernet line between the PS control section MC1 or MC2, or theLM control section MC3 that is the corresponding group and the centralcontrol section EC is disconnected (S3). This enables the suspension ofaccesses to all the hardware including the CPU only of the process shipPS1 when, for example, the process ship PS1 is selected as thecorresponding group, and consequently, the interruption of all thepowers for usage involved in the process ship PS1 and the interruptionof an electric power to the CPU are made possible while the process shipPS2 and the loader module LM are kept operated.

[0048] When the shift to the group power-off mode GP is completed, ashift completion message is displayed on the display section D1 (S4).Then, the operator, upon confirming the shift to the group power-offmode GP, turns off the breaker B1 to B3 of the corresponding group toturn off the power supply of the PS control section MC1 or MC2, or theLM control section MC3 (S5), so that the operator can performmaintenance work for the corresponding group (S6). Through thismaintenance work, part exchange, remodeling, and so on in the processship PS1 or PS2 having abnormality are made possible while theproduction is continued using the process ship PS1 or PS2 in a normalstate, which can reduce the down time of the whole equipment.

[0049] When the maintenance work is finished, the operator normallyconnects the hardware such as the I/O board 101 to 103 and the powersupply of the corresponding group (S7) and turns on the power supply ofthe PS control section MC1 or Mc2, or the LM control section MC3 of thecorresponding group (S8).

[0050] When the power supply of the corresponding group is turned on, i)the link is established, ii) a program for controlling the PS controlsection MC1 or MC2 or the LM control section MC3 is downloaded to thecorresponding group, iii) data stored in the PS control section MC1 orMC2 or the LM control section MC3 that is the corresponding group ismade consistent with data in the central control section EC, iv) I/Oself diagnosis is performed, v) use/nonuse setting for each I/O is madefrom the PS control section MC1 or MC2, or the LM control section MC3that is the corresponding group, vi) the I/Os are initialized, and vii)the corresponding group is started in the maintenance state, resultingin the restoration of the corresponding group (S9). Then, when therestoration of the corresponding group is completed, the restorationcompletion message is displayed on the display section D1 (S10).

[0051]FIG. 7 is a flowchart showing an independent maintenance methodaccording to a second embodiment of the present invention. Note that, inthis second embodiment, independent maintenance is performed in themodule power-off mode MP in FIG. 3. In this module power-off mode MP, itis possible to produce the state in which only the power supply involvedin a designated module can be turned off, and the CPU of the PS controlsection MC1 or MC2, or the LM control section MC3 is not the object ofelectric power interruption. This eliminates the necessity of restartingsoftware such as downloading a program after the maintenance work, whichcan further reduce the restoration time of the equipment after themaintenance work.

[0052] In FIG. 7, an operator shifts on the screen of the displaysection D1 in FIG. 1 to a maintenance window of a module for whichmaintenance is to be performed (S21) and gives a module power-off modeMP execution demand (S22). Here, for example, any one of the I/O boards101 to 103 or the like can be designated as the module for which themaintenance is to be performed.

[0053] When the module power-off mode MP execution demand is given, i)the I/O board 101 to 103 of a corresponding group is initialized, ii)access to all input/output data DIO and input/output addresses AIO aresuspended, iii) communication between the PS control section MC1 or MC2,or the LM control section MC3 that is the corresponding group andexternal equipment is suspended, and iv) a communication line betweenthe PS control section MC1 or MC2, or the LM control section MC3 that isthe corresponding group and the I/O board 101 to 103 is disconnected(S23). Consequently, accesses to the hardware except the CPU of the PScontrol section MC1 or MC2, or the LM control section MC3 can besuspended, which enables the exchange and so on of the I/O board 101 to103 only by minimum partial power interruption required.

[0054] When the shift to the module power-off mode MP is completed, theshift completion message is displayed on the display section D1 (S24).Then, the operator, upon confirming the shift to the module power-offmode MP, can interrupt the electric power to the I/O board 101 to 103that is the object of the maintenance (S25) and can perform themaintenance work of the corresponding module (S26). Through thismaintenance work, the exchange and so on of the I/O board 101 to 103 ismade possible while the CPU of the PS control section MC1 or MC2, or theLM control section MC3 is kept operated, which can reduce therestoration time of the equipment after the maintenance work.

[0055] When the maintenance work is finished, the operator normallyconnects the hardware such as the I/O board 101 to 103 and the powersupply of the corresponding group (S27) and gives a restoration demandof the corresponding module on the screen of the display section D1(S28).

[0056] When the restoration demand of the corresponding module is given,i) an Ethernet line between the central control section EC and the I/Oboard 101 to 103 is connected, ii) communication between the PS controlsection MC1 or MC2, or the LM control section MC3 that is thecorresponding group and the external equipment is started, iii) I/Oself-diagnosis is performed, iv) the I/O board 101 to 103 isinitialized, v) accesses to all input/output data DIO and input/outputaddresses AIO are started, and vi) the corresponding group is started inthe maintenance state, resulting in the restoration of the correspondinggroup (S29). Then, when the restoration of the corresponding module iscompleted, a restoration completion message is displayed on the displaysection D1 (S30).

[0057] Incidentally, the explanation in the above-described embodimentis given on the case when two process ships PS1, PS2, three load portsLP1 to LP3, and only one orienter are provided, but the number of theprocess ships PS1, PS2 may be any as long as it is two or more, thenumber of the load ports LP1 to LP3 may be any as long as it is one ormore, and two orienters may be provided, one for each of both sides ofthe transfer chamber TR. Further, the explanation is given on the casewhen two wafer mounting tables B11 and B12, or B21 and B22 are providedin each of the load lock chambers LL1 and LL2, but one wafer mountingtable may be provided in each of the load lock chambers LL1 and LL2. Thecase when the loader arms LA1 and LA2 have the two-stage structure isexplained, but a one-stage structure may also be adopted. As isexplained hitherto, according to the present invention, the operation ofthe process ship and the loader module can be checked while the processship is not coupled to the loader module.

[0058] Further, according to the present invention, it is possible toperform maintenance of an arbitrary process ship while the wholeequipment is not stopped.

INDUSTRIAL APPLICABILITY

[0059] A semiconductor production system, a cluster tool, a controlmethod of the semiconductor production system, and a maintenance methodof the cluster tool according to the present invention are usable in thesemiconductor manufacturing industry and so on that manufacturesemiconductor devices. Therefore, they have industrial applicability.

What is claimed is:
 1. A semiconductor production system, comprising: aprocess ship having a process chamber and a load lock chamber coupled toeach other; and an independent control section configured to controlsaid process ship to operate while said process ship is not coupled to aloader module.
 2. A semiconductor production system, comprising: aloader module configured to house, align, and transfer an object to beprocessed; and an independent control section configured to control saidloader module to operate while said loader module is not coupled to aprocess ship.
 3. A cluster tool, comprising: a plurality of processchambers each configured to process an object to be processed; load lockchambers coupled to said process chambers respectively and eachconfigured to transfer said object to be processed to each of saidprocess chambers; a loader module coupled to said load lock chambers andconfigured to transfer said object to be processed to each of said loadlock chambers; and an independent control section configured toindependently control each unit that is an object of maintenance.
 4. Acontrol method of a semiconductor production system, wherein transfer ofeach unit is independently controlled while a unit to be additionallyinstalled of a cluster tool is not coupled.
 5. A maintenance method of acluster tool in which a plurality of process ships are coupled to aloader module, wherein maintenance is carried out while only a unit thatis an object of the maintenance is stopped.